JPH0727102Y2 - 吸着装置 - Google Patents
吸着装置Info
- Publication number
- JPH0727102Y2 JPH0727102Y2 JP8577990U JP8577990U JPH0727102Y2 JP H0727102 Y2 JPH0727102 Y2 JP H0727102Y2 JP 8577990 U JP8577990 U JP 8577990U JP 8577990 U JP8577990 U JP 8577990U JP H0727102 Y2 JPH0727102 Y2 JP H0727102Y2
- Authority
- JP
- Japan
- Prior art keywords
- adsorption
- exhaust
- exhaust pipe
- suction
- adsorbed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 title claims description 49
- 230000008878 coupling Effects 0.000 claims description 11
- 238000010168 coupling process Methods 0.000 claims description 11
- 238000005859 coupling reaction Methods 0.000 claims description 11
- 239000013013 elastic material Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 7
- 230000006837 decompression Effects 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8577990U JPH0727102Y2 (ja) | 1990-08-14 | 1990-08-14 | 吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8577990U JPH0727102Y2 (ja) | 1990-08-14 | 1990-08-14 | 吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0445687U JPH0445687U (en]) | 1992-04-17 |
JPH0727102Y2 true JPH0727102Y2 (ja) | 1995-06-21 |
Family
ID=31817143
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8577990U Expired - Lifetime JPH0727102Y2 (ja) | 1990-08-14 | 1990-08-14 | 吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0727102Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08187690A (ja) * | 1995-01-09 | 1996-07-23 | Kitano Shoji Kk | 吸着搬送方法およびその装置 |
-
1990
- 1990-08-14 JP JP8577990U patent/JPH0727102Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0445687U (en]) | 1992-04-17 |
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